Measurement of Fine Surface Profile with Two-Wavelength Phase-Shift Interferometry

Journal of the Japan Society for Precision Engineering

Volumn 57, Issue 9, 1991, Pages 1633-1638

  Nishikawa, Takayuki ^a   Takayasu, Takurou ^a   Iwata, Koichi ^a  

^a NONE

Author keywords

equivalent wavelength method; fringe order; fringe counting two wavelength method; interferometry; phase shifting method

Indexed keywords

INTERFEROMETRY; MATHEMATICAL TECHNIQUES--ALGORITHMS;

EQUIVALENT WAVELENGTH; PHASE SHIFT;

SURFACES;

EID: 0026219381     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.57.1633     Document Type: Article

References (5)

1. J. H. Bruning et al: Digital Wavefront Measurement Interferometer for Testing Optical Surfaces and Lenses, APPL. OPT., 13, (1974) 2693.
2. J. H. Bruning: Fringe Scaning Interferometer Optical Shop Testing, D. Malacara ed, Wiley, New York, (1978) 409.
3. J. Schwider et al: Digital Wave-front Measuring Interferometry: Some Systematic Erri or Souces, APPL. OPT., 22, (1983) 3421.
4. Katherine Creath, Yeou-Yen Cheng and J. C., Wyant: Contouring Aspheric Surface Using Two-wavelength Phase-shifting Interferometry, Optica Acta, 32, (1985) 1455.
5. K. Creath: Step Height Measurement Using Two-wavelength Phase-shifting Interferometry, APPL. OPT., 26, (1987) 2810.