Silica-Based Oxide Systems

Journal of the Electrochemical Society

Volumn 138, Issue 9, 1991, Pages 2836-2838

  Bernard, C ^a  

^a UNIV GRENOBLE ALPES   (France)

^b LABORATOIRE DES MATÉRIAUX ET DU GÉNIE PHYSIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS, VLSI - MATERIALS; OXIDES - PHASE DIAGRAMS; SILICA - THERMODYNAMIC PROPERTIES; THERMODYNAMICS - MATHEMATICAL MODELS;

GIBBS FREE ENTHALPY; PLANARIZATION LAYERS;

GLASS;

EID: 0026219004     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2086067     Document Type: Article

References (15)

1. W. Kern, G. L. Schnable, and A. W. Fisher, RCA Rev., 37, 3 (1976).
2. W. Kern and G. L. Schnable, RCA Rev., 43, 423 (1982).
3. R. S. Roth, T. Negas, and L. P. Cook, &“Phase Diagrams for Ceramists,&” The American Ceramic Society, Westerville, OH (1983).
4. G. Baret, R. Madar, and C. Bernard, J Electrochem. Soc., 138, 2830 (1991).
5. K. Nassau, R. A. Levy, and D. L. Chadwich, J Electrochem. Soc., 132, 409 (1985).
6. J. Zarzycki, &“Les Verres et l&'&État Vitreux,&” Masson, Paris (1982).
7. S. Sakka and J. D. Mackenzie, J. Non Cryst. Solids, 6, 145 (1971).
8. J. E. Tong, K. Schertenleib, and R. A. Carpio, Solid State Technol., 27, 161 (1984).
9. J. F. Teissier, CNET-CNS Report (1986).
10. W. Kern, Semicond. Int., 8, 121 (1985).
11. E. M. Levin, C. R. Robbins, and H. F. McMurdie, &“Phase Diagrams for Ceramists,&” The American Ceramie Society, Westerville, OH (1964).
12. T. J. Rockett and W. R. Foster, J. Am. Ceram. Soc., 45 (2), 75 (1965).
13. E. M. Levin, C. R. Robbins, and H. F. McMurdie, &“Phase Diagrams for Ceramists,&” The American Ce-ramie Society, Westerville, OH (1969).
14. W. F. Horn and F. A. Hummel, J. Soc. Glass Technol., 39 (3), 113(1955).
15. E. F. Riebling, J. Am. Ceram. Soc., 56 (6), 303 (1973).