Using Spatial Information to Analyze Correlations Between Test Structure Data

IEEE Transactions on Semiconductor Manufacturing

Volumn 4, Issue 3, 1991, Pages 219-225

  Kibarian, John K ^a   Strojwas, Andrzej J ^a  

^a UNIVERSITY OF PITTSBURGH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DATA PROCESSING--DATA STRUCTURES; SEMICONDUCTOR DEVICE MANUFACTURE; STATISTICAL METHODS;

SPATIAL CORRELATIONS;

SEMICONDUCTOR DEVICE TESTING;

EID: 0026203022     PISSN: 08946507     EISSN: 15582345     Source Type: Journal    
DOI: 10.1109/66.85943     Document Type: Article

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