Spatially resolved optical emission and electrical properties of SiH4 RF discharges at 13.56 MHz in a symmetric parallel-plate configuration

Journal of Physics D: Applied Physics

Volumn 24, Issue 6, 1991, Pages 865-881

  Bohm, Christian ^a   Perrin, Jerome ^a  

^a ECOLE POLYTECHNIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

LOW-PRESSURE RADIO-FREQUENCY DISCHARGES; SILICON ELECTRICAL PROPERTIES; SPATIALLY RESOLVED OPTICAL EMISSION PROPERTIES; SYMMETRIC PARALLEL-PLATE CONFIGURATION;

ELECTRIC FIELD MEASUREMENT - APPLICATIONS; OPTICAL VARIABLES MEASUREMENT - APPLICATIONS; SILICON COMPOUNDS - ANALYSIS;

RADIO TRANSMISSION;

EID: 0026173053     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/24/6/011     Document Type: Article

References (0)