Fluorine-Enhanced Oxidation of Silicon Effects of Fluorine on Oxide Stress and Growth Kinetics

Journal of the Electrochemical Society

Volumn 138, Issue 6, 1991, Pages 1752-1755

  Kouvatsos, D ^a   Huang, J G ^a   Jaccodine, R J ^a  

^a LEHIGH UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTIONS - REACTION KINETICS; FLUORINE - EFFECTS; SILICA - STRESSES;

FLUORINE ENHANCED OXIDATION;

SEMICONDUCTING SILICON;

EID: 0026168863     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2085867     Document Type: Article

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