Diamond Transistor Performance and Fabrication

Proceedings of the IEEE

Volumn 79, Issue 5, 1991, Pages 669-676

  Geis, Michael W ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BAND STRUCTURE; ELECTRIC CONTACTS, OHMIC; MICROSCOPIC EXAMINATION - SCANNING ELECTRON MICROSCOPY; TRANSISTORS - FABRICATION;

BORON CONCENTRATION; HOMOEPITAXIAL DIAMOND; ION-BEAM ASSISTED ETCHING; SILICA-DIAMOND INTERFACE;

SEMICONDUCTING DIAMONDS;

EID: 0026154321     PISSN: 00189219     EISSN: 15582256     Source Type: Journal    
DOI: 10.1109/5.90131     Document Type: Article

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