SCOPUS 정보 검색 플랫폼

Volumn 48-49, Issue C, 1991, Pages 555-566

Sputtered TiN thin films for improved corrosion resistance

Author keywords

[No Author keywords available]

Indexed keywords

PROTECTIVE COATINGS - CERAMICS; SPUTTERING; STAINLESS STEEL - PROTECTIVE COATINGS;

RADIO-FREQUENCY SPUTTERING; STAINLESS STEEL 304; STAINLESS STEEL 316; TITANIUM NITRIDE;

CERAMIC MATERIALS;

EID: 0026152866 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/0169-4332(91)90390-6 Document Type: Article

Times cited : (19)

References (15)

2
- 0023450180
- (1987) Thin Solid Films , vol.154 , pp. 387
- Aral¹ Fujita² Watanabe³

3
- 0023450185
- (1987) Thin Solid Films , vol.154 , pp. 425
- Al-Jaroud¹ Hentzell² Valli³

4
- 0042905295
- Characterization of titanium nitride films sputter deposited from a high-purity titanium nitride target
- (1987) Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures , vol.5 , pp. 1741
- Brat¹ Pasikh² Tsai³ Sinha⁴ Poole⁵ Wickersham⁶

5
- 0012587041
- Nitrogen, oxygen, and argon incorporation during reactive sputter deposition of titanium nitride
- (1987) Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures , vol.5 , pp. 1723
- Williams¹ Baiocchi² Beairsto³ Brown⁴ Kroell⁵ Muraka⁶

9
- 0023450182
- (1987) Thin Solid Films , vol.154 , pp. 403
- Burnett¹ Rickberry²

13
- 0021372466
- A study of the corrosion behavior of TiN films
- (1985) Materials Science and Engineering , vol.69 , pp. 89
- Erdemier¹ Carter² Hochman³ Meletis⁴

14
- 0023535191
- J. Met. Appl. Technol.
- (1987) J. Met. Appl. Technol. , pp. 25
- Meletis¹ Hochman²

15
- 0024586889
- Wear-corrosion behavior of ion plated thin films
- (1988) Journal of Materials Engineering , vol.11 , pp. 159
- Meletis¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.