-
1
-
-
83455249023
-
Electron cyclotron resonance microwave discharges for etching and thin-film deposition
-
May/June
-
J. Asmussen, “Electron cyclotron resonance microwave discharges for etching and thin-film deposition,” J. Vac. Sci. Technol. A, vol. 7, no. 3, p. 883, May/June 1989.
-
(1989)
J. Vac. Sci. Technol. A
, vol.7
, Issue.3
, pp. 883
-
-
Asmussen, J.1
-
2
-
-
4243870813
-
Properties of steady-state, high-pressure, argon microwave discharges
-
J. Rogers, “Properties of steady-state, high-pressure, argon microwave discharges,” Ph.D. thesis, Michigan State Univ., East Lansing, 1982.
-
(1982)
Ph.D. thesis, Michigan State Univ., East Lansing
-
-
Rogers, J.1
-
3
-
-
27844487617
-
Production of XeO* in a CW microwave discharge
-
M. L. Passow and M. L. Brake, “Production of XeO* in a CW microwave discharge,” Plasma Chem. Plasma Process., vol. 9, p. 497, 1989.
-
(1989)
Plasma Chem. Plasma Process
, vol.9
, pp. 497
-
-
Passow, M.L.1
Brake, M.L.2
-
4
-
-
0015974505
-
The design of a microwave plasma cavity
-
Jan.
-
J. Asmussen. R. Mallavarpu, J. Hamann, and H. C. Park, “The design of a microwave plasma cavity,” Proc. IEEE., vol. 62, p. 109, Jan. 1974.
-
(1974)
Proc. IEEE
, vol.62
, pp. 109
-
-
Asmussen, J.1
Mallavarpu, R.2
Park, H.C.3
-
5
-
-
0018046032
-
Behavior of a microwave cavity discharge over a wide range of pressures and flow rates
-
Aug.
-
R. Mallavarpu, J. Asmussen, and M. Hawley, “Behavior of a microwave cavity discharge over a wide range of pressures and flow rates,” IEEE Trans. Plasma Sci., vol. PS-6, 341, Aug. 1978.
-
(1978)
IEEE Trans. Plasma Sci
, vol.PS-6
, Issue.341
-
-
Mallavarpu, R.1
Asmussen, J.2
Hawley, M.3
-
8
-
-
0022130492
-
Dissociation and recombination of oxygen atoms produced in a microwave discharge, Part I: Experiment
-
M. Brake, J. Rogers, M. Peters, J. Asmussen, and R. Kerber, “Dissociation and recombination of oxygen atoms produced in a microwave discharge, Part I: Experiment,” Plasma Chem. Plasma Process., vol. 5, no. 3, 255, 1985.
-
(1985)
Plasma Chem. Plasma Process
, vol.5
, Issue.3
, pp. 255
-
-
Brake, M.1
Rogers, J.2
Peters, M.3
Asmussen, J.4
Kerber, R.5
-
10
-
-
49249150593
-
A new microwave plasma at atmospheric pressure
-
J. Hubert, M. Moisan, and A. Ricard, “A new microwave plasma at atmospheric pressure,” Spectrochim. Acta, vol. 34B, p. 1, 1979.
-
(1979)
Spectrochim. Acta
, vol.34B
, pp. 1
-
-
Hubert, J.1
Moisan, M.2
Ricard, A.3
-
11
-
-
0015682530
-
Radial neutral gas temperature and density profiles in low-pressure argon discharges
-
J. G. Eden and B. E. Cherrington, “Radial neutral gas temperature and density profiles in low-pressure argon discharges,” J. Appl. Phys., vol. 44, no. 11, p. 4920, 1973.
-
(1973)
J. Appl. Phys
, vol.44
, Issue.11
, pp. 4920
-
-
Eden, J.G.1
Cherrington, B.E.2
-
12
-
-
0013511283
-
Viscosity and thermal conductivity of dry air
-
K. Kadoya, N. Matsunaga, and A. Nagashima, “Viscosity and thermal conductivity of dry air,” J. Phys. Chem. Ref Data., vol. 14, no. 4, 947, 1985.
-
(1985)
J. Phys. Chem. Ref Data
, vol.14
, pp. 947
-
-
Kadoya, K.1
Matsunaga, N.2
Nagashima, A.3
-
13
-
-
36849122148
-
Eigenvalues of a microwavecavity-lossy-plasma system
-
J. L. Shohet and C. Moskowitz, “Eigenvalues of a microwavecavity-lossy-plasma system,” J. Appl. Phys., vol. 36, no. 5, p. 1756, 1965.
-
(1965)
J. Appl. Phys
, vol.36
, Issue.5
, pp. 1756
-
-
Shohet, J.L.1
Moskowitz, C.2
-
14
-
-
0542377580
-
Resonances of a microwave cavity partially filled with a plasma
-
B. Agbur and B. Enander, “Resonances of a microwave cavity partially filled with a plasma,” J. Appl. Phys., vol. 33, no. 2, p. 575, 1962.
-
(1962)
J. Appl. Phys
, vol.33
, Issue.2
, pp. 575
-
-
Agbur, B.1
Enander, B.2
-
15
-
-
4043095303
-
Electrode less high-pressure microwave discharges
-
S. Offermanns, “Electrode less high-pressure microwave discharges,” J. Appl. Phys., vol. 67, 115, 1990.
-
(1990)
J. Appl. Phys
, vol.67
, Issue.115
-
-
Offermanns, S.1
-
17
-
-
0004062749
-
-
Reading, MA: Addison-Wesley
-
S. Wolfram, Mathematica. Reading, MA: Addison-Wesley, 1988.
-
(1988)
Mathematica
-
-
Wolfram, S.1
-
18
-
-
0022130492
-
Electron density measurements of argon surface-wave discharges
-
M. L. Brake, J. Rogers, M. Peters, J. Asmussen, and R. Kerber, “Electron density measurements of argon surface-wave discharges,” Plasma Chem. Plasma Process., vol. 5, 255, 1985.
-
(1985)
Plasma Chem. Plasma Process
, vol.5
, Issue.255
-
-
Brake, M.L.1
Rogers, J.2
Peters, M.3
Asmussen, J.4
Kerber, R.5
-
19
-
-
0001493999
-
Electron energy distributions and collision rates in electrically excited N2, CO, and CO2
-
W. Nighan, “Electron energy distributions and collision rates in electrically excited N 2, CO, and CO 2,” Phys. Rev. A, vol. 2, no. 5, p. 1989, 1970.
-
(1970)
Phys. Rev. A
, vol.2
, Issue.5
, pp. 1989
-
-
Nighan, W.1
|