Laser etching of bi-sr-ca-cu-o superconducting thin films

Japanese Journal of Applied Physics

Volumn 30, Issue 3A, 1991, Pages 355-357

  Oohira, Tsunehiro ^a   Sakai, Shigeki ^a   Kasai, Yuji ^a   Atoda, Nobufumi ^a   Shimizu, Keizo ^a  

^a ELECTROTECHNICAL LABORATORY   (Japan)

Author keywords

Assist etching; Bi Sr Ca Cu O; High Tc superconductor; Laser etching

Indexed keywords

BISMUTH COMPOUNDS; CERAMIC MATERIALS; ETCHING--LASER APPLICATIONS; MICROSCOPIC EXAMINATION; ETCHING - LASER APPLICATIONS; HARMONIC GENERATION;

BISMUTH STRONTIUM CALCIUM COPPER OXIDES; OXIDE SUPERCONDUCTORS;

HIGH TEMPERATURE SUPERCONDUCTORS;

EID: 0026124832     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.30.L355     Document Type: Article

References (7)

1. A. Inam, X. D. Wu, T. Venkatesan, S. B. Ogale, C. C. Chang and D. Dijkkamp: Appl. Phys. Lett. 51 (1987) 1112.
2. J. Mannhart, M. Scheuermann, C. C. Tsuei, M. M. Oprysko, C. C. Chi, C. P. Umbach, R. H. Koch and C. Miller: Appl. Phys. Lett. 52 (1988) 1271.
3. J. P. Zheng, H. S. Kim, Q. Y. Ying, R. Barone, P. Bush, D. T. Shaw and H. S. Kwok: Appl. Phys. Lett. 55 (1989) 1044.
4. S. Sakai, Y. Kasai, T. Tanoue, N. Atoda and K. Shimizu: Proc. of 2nd Workshop on High-Temp. Supercond. Electron Devices (R and D Assoc, for Future Electron Devices, Tokyo, 1989) p. 113.
5. for example, F. C. Wellstood, J. J. Kingston and J. Clarke: Appl. Phys. Lett. 56 (1990) 2336.
6. for example, R. S. Withers, A. C. Anderson and D. E. Oates: Solid State Technol. 33 (1990) No. 8, 83.
7. P. A. Maki and D. J. Ehrlich: Appl. Phys. Lett. 55 (1989) 91.