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Volumn 27, Issue 2, 1991, Pages 3125-3128

A Simple and Robust Niobium Josephson Junction Integrated Circuit Process

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS; NIOBIUM AND ALLOYS; SEMICONDUCTOR MATERIALS; SUPERCONDUCTING MATERIALS;

EID: 0026121893     PISSN: 00189464     EISSN: 19410069     Source Type: Journal    
DOI: 10.1109/20.133873     Document Type: Article
Times cited : (29)

References (17)
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  • 5
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    • Application of sputtered SiO2 insulator to Nb/A1Ox/Nb Josephson junctions
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  • 7
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    • Kosaka, S.1
  • 8
    • 0024128971 scopus 로고
    • Integration of Nb/AlOx/Nb Junctions Planarized with Bias-Sputtered SiO2 Films
    • A.F. Clark and R.P. Reed, eds., Plenum, New York
    • H. Hoko, T. Imamura, S. Hasuo, “Integration of Nb/AlO x /Nb Junctions Planarized with Bias-Sputtered SiO 2 Films,” pp 773–787 in Advances in Cryogenic Engineering, Vol. 34, A.F. Clark and R.P. Reed, eds., Plenum, New York, 1988.
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.