Preparation of amorphous carbon films as protective layer by FTS system

Materials Science and Engineering A

Volumn 134, Issue C, 1991, Pages 1296-1300

  Kawanabe, Takashi ^a   Takahashi, Takakazu ^b   Hoshi, Yoichi ^c   Naoe, Masahiko ^d  

^a IBM JAPAN LTD   (Japan)

^b UNIVERSITY OF TOYAMA   (Japan)

^c TOKYO POLYTECHNIC UNIVERSITY   (Japan)

^d TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS - THIN FILMS; FILMS - PREPARATION; SPUTTERING - PLASMA APPLICATIONS;

FACING TARGETS SPUTTERING;

CARBON;

EID: 0026121603     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/0921-5093(91)90977-U     Document Type: Article

References (6)

1. Raman Spectrum of Graphite