Modeling of RF plasma torch with a metallic tube inserted for reactant injection

Plasma Chemistry and Plasma Processing

Volumn 11, Issue 1, 1991, Pages 103-128

  Chen, Xi ^a   Pfender, E ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

injection probe; modeling; RF plasma torch

Indexed keywords

ELECTROMAGNETIC FIELDS; MATHEMATICAL MODELS; SUPERCONDUCTING FILMS - PREPARATION;

INJECTION PROBE; RADIO FREQUENCY THERMAL PLASMA TORCH MODELLING; RF PLASMA TORCH; STAINLESS STEEL INJECTION TUBE; TOROIDAL VORTEX;

PLASMA DEVICES;

EID: 0026116823     PISSN: 02724324     EISSN: 15728986     Source Type: Journal    
DOI: 10.1007/BF01447036     Document Type: Article

References (16)