Oxidation protection for a variety of transition metals and copper via surface silicides formed with silane containing atmospheres

Journal of Materials Research

Volumn 6, Issue 1, 1991, Pages 71-79

  Kirner, J F ^b   Armor, J N ^b  

^a PONTIFICIA UNIVERSIDAD CATÓLICA DE CHILE   (Chile)

^b AIR PRODUCTS AND CHEMICALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER AND ALLOYS--PROTECTIVE COATINGS; PROTECTIVE COATINGS--X-RAY ANALYSIS; TRANSITION METALS--PROTECTIVE COATINGS;

SILICIDE COATINGS; X-RAY DIFFRACTION;

METALS AND ALLOYS;

EID: 0026049948     PISSN: 08842914     EISSN: 20445326     Source Type: Journal    
DOI: 10.1557/JMR.1991.0071     Document Type: Article

References (9)

1. A. L. Cabrera, J. F. Kirner, R. A. Miller, and R. Pierantozzi, U.S. Patent 4714632 (1987).
2. A. L. Cabrera, J. F. Kirner, and R. Pierantozzi, J. Mater. Res. 5, 74 (1990).
3. A. L. Cabrera and J. F. Kirner, Surf. Coat. Technol. 39/40, 43 (1989).
4. L. H. Dubois and R. G. Nuzzo, J. Vac. Sci. Technol. A2 (2), 441 (1984).
5. A. Abba, A. Galerie, and M. Caillet, Mater. Chem. 5, 147 (1980).
6. F. Rebuffat, A. Galerie, M. Caillet, and J. Besson, Mater. Chem. 7, 517 (1982).
7. M. Pons, A. Galerie, and M. Caillet, Mater. Chem. Phys. 8, 153 (1983).
8. Vapor Deposition, edited by C. F. Powell, J. H. Oxley, and J. M. Blocher (John Wiley and Sons, New York, 1966).
9. ASHRAE Handbook of Fundamentals (American Society of Heating and Air-Conditioning Engineers, New York, 1972), p. 5.2.