Method for semiconductor process optimization using functional representations of spatial variations and selectivity

IEEE/CHMT European International Electronic Manufacturing Technology Symposium

Volumn , Issue , 1991, Pages 115-121

  Mozumder, Purnendu K ^a   Loewenstein, Lee M ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON COMPOUNDS - THIN FILMS; SEMICONDUCTOR DEVICE MANUFACTURE - OPTIMIZATION;

ASIC MANUFACTURING; PROCESS MODELING; SEMICONDUCTOR PROCESS OPTIMIZATION;

SEMICONDUCTING FILMS;

EID: 0025926716     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)