Interfaces in Mo/Si multilayers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 1343, Issue , 1991, Pages 73-82

  Slaughter, J M ^a   Kearney, Patrick A ^a   Schulze, Dean W ^a   Falco, Charles M ^a   Watts, R N ^a   Hills, C R ^a   Saloman, E B ^a  

^a UNIVERSITY OF ARIZONA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSCOPES, ELECTRON - APPLICATIONS; MOLECULAR BEAM EPITAXY - APPLICATIONS; MOLYBDENUM SILICON ALLOYS - APPLICATIONS; SPECTROSCOPY, AUGER ELECTRON - APPLICATIONS;

ELECTRON BEAM EVAPORATION; LOW ENERGY ELECTRON DIFFRACTION (LEED); MOLYBDENUM/SILICON INTERFACES; MULTILAYER CHARACTERIZATION; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION (RHEED); SYNCHROTRON RADIATION CHARACTERIZATION;

MIRRORS;

EID: 0025887921     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.23177     Document Type: Conference Paper

References (17)