Strain evaluation at the Si/SiO2 interface using ER method

Conference on Solid State Devices and Materials

Volumn , Issue , 1991, Pages 35-37

  Yongwattanasoontorn, Pornchai ^a   Kubo, Hitoshi ^a   Morifuji, Masato ^a   Taniguchi, Kenji ^a   Hamaguchi, Chihiro ^a   Imai, Keitaro ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON COMPOUNDS; SURFACES--STRAIN;

ELECTROREFLECTANCE; SPIN-ORBIT INTERACTIONS;

SEMICONDUCTING SILICON;

EID: 0025867910     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)