Film actuators: Planar, electrostatic surface-drive actuators

Proceedings. IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1991, Pages 9-14

  Egawa, Saku ^a   Niino, Toshiki ^a   Higuchi, Toshiro ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC INSULATING MATERIALS--THIN FILMS; ELECTRIC MACHINERY--STATORS; ELECTRODES;

FILM ACTUATORS;

ACTUATORS;

EID: 0025840977     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)