Surface-machined micromechanical membrane pump

Proceedings. IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1991, Pages 182-186

  Judy, Jack W ^a   Tamagawa, Takashi ^a   Polla, Dennis L ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTROSTATIC DEVICES; LITHOGRAPHY--PHOTOLITHOGRAPHY; MEMBRANES--PUMPS; SEMICONDUCTING SILICON;

MICROMECHANICAL MEMBRANE PUMPS; PUMPING MEMBRANES;

ELECTROMECHANICAL DEVICES;

EID: 0025807422     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)