Monte Carlo modeling of secondary electron signals from heterogeneous specimens with nonplanar surfaces

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 1464, Issue , 1991, Pages 10-21

  Russ, John C ^a   Dudley, Bruce W ^a   Jones, Susan K ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL STATISTICS - MONTE CARLO METHODS; MICROSCOPIC EXAMINATION - SCANNING ELECTRON MICROSCOPY;

METROLOGY; MICROELECTRONIC DEVICES; MONTE CARLO MODELING; SIMULATION PROGRAM;

PHOTORESISTS;

EID: 0025794948     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.44420     Document Type: Conference Paper

References (1)