Polysilicon thin film transistor material and device technologies

Conference on Solid State Devices and Materials

Volumn , Issue , 1991, Pages 586-589

  Chiang, A ^a   Wu, I W ^a   Hack, M ^a   Lewis, A G ^a   Huang, T Y ^a   Tsai, C C ^a  

^a PALO ALTO RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON;

LOCVD; SILICON TFT; SILICON TRANSISTORS;

TRANSISTORS, FIELD EFFECT;

EID: 0025749345     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)