Dopant selective HF anodic etching of silicon--For the realization of low-doped monocrystalline silicon microstructures

Proceedings. IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1991, Pages 221-226

  Branebjerg, J ^a   Eijkel, C J M ^a   Gardeniers, J G E ^a   van de Pol, F C M ^a  

^a DANFOSS A S   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; CRYSTALS--MICROSTRUCTURE; ELECTROMECHANICAL DEVICES--MICROELECTROMECHANICAL;

HF ANODIC ETCHING; MONOCRYSTALLINE SILICON;

SEMICONDUCTING SILICON;

EID: 0025723090     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (22)