Resolution performance of a 0.60 NA, 364 nm laser direct writer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 1264, Issue , 1990, Pages 454-465

  Allen, Paul C ^a   Buck, Peter ^a  

^a ATEQ Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS--MANUFACTURE; OPTICAL INSTRUMENTS--RESOLVING POWER; PHOTORESISTS; PRINTED CIRCUITS;

LASER DIRECT WRITER; LASER SCANNING PRINTING ENGINE; LASER-BASED MICROLITHOGRAPHY;

LITHOGRAPHY;

EID: 0025683587     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.20200     Document Type: Conference Paper

References (5)