Spiral microstructures for the measurement of average strain gradients in thin films

Proceedings. IEEE Micro Electro Mechanical Systems-An Investigation of Micro Structures, Sensors, Actuators, Machines

Volumn , Issue , 1990, Pages 177-181

  Fan, Long Sheng ^a   Muller, Richard S ^a   Yun, Weijie ^a   Howe, Roger T ^a   Huang, Jiahua ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILMS--MECHANICAL PROPERTIES; SPRINGS--HELICAL; STRAIN--MEASUREMENTS;

ARCHIMEDEAN SPIRALS; MICROMACHINED SPIRAL SPRINGS; MICROMECHANICS; SPIRAL MICROSTRUCTURES; STRAIN GRADIENTS; THIN FILM MATERIALS;

SEMICONDUCTING FILMS;

EID: 0025661782     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)