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Volumn 18, Issue 6, 1990, Pages 904-910

Pressure limits for the vacuum arc deposition technique

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; ELECTRIC ARCS; PLASMAS; PRESSURE EFFECTS;

EID: 0025637940     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.61501     Document Type: Article
Times cited : (30)

References (9)
  • 1
    • 0023440298 scopus 로고
    • Technical note: A review of cathodic arc plasma deposition processes and their applications
    • H. Randhawa P. C. Johnson Technical note: A review of cathodic arc plasma deposition processes and their applications Surface and Coat. Techn. 31 303 318 1987
    • (1987) Surface and Coat. Techn. , vol.31 , pp. 303-318
    • Randhawa, H.1    Johnson, P.C.2
  • 2
    • 0024751356 scopus 로고
    • Principles and applications of vacuum arc coatings
    • R. L. Boxman S. Goldsmith Principles and applications of vacuum arc coatings IEEE Trans. Plasma Sci. 17 705 712 Oct. 1989
    • (1989) IEEE Trans. Plasma Sci. , vol.17 , pp. 705-712
    • Boxman, R.L.1    Goldsmith, S.2
  • 3
    • 0010782427 scopus 로고
    • The cathodic arc plasma deposition of thin films
    • P. C. Johnson The cathodic arc plasma deposition of thin films Phys. Thin Films 14 129 199 1989
    • (1989) Phys. Thin Films , vol.14 , pp. 129-199
    • Johnson, P.C.1
  • 4
    • 0022797850 scopus 로고
    • Experimental study of the effect of gas pressure on arc cathode erosion and redeposition in He. Ar and SF6 from vacuum to atmospheric pressure
    • J.-L. Meunier M. G. Drouet Experimental study of the effect of gas pressure on arc cathode erosion and redeposition in He. Ar and SF6 from vacuum to atmospheric pressure IEEE Trans. Plasma Sci. PS-15 515 519 Oct. 1987
    • (1987) IEEE Trans. Plasma Sci. , vol.PS-15 , pp. 515-519
    • Meunier, J.-L.1    Drouet, M.G.2
  • 5
    • 0000226631 scopus 로고
    • Langmuir probe and microwave measurements of the properties of streaming plasmas generated by focussed laser pulses
    • D. W. Koopman Langmuir probe and microwave measurements of the properties of streaming plasmas generated by focussed laser pulses Phys. Fluids 14 8 1707 1716 1971
    • (1971) Phys. Fluids , vol.14 , Issue.8 , pp. 1707-1716
    • Koopman, D.W.1
  • 6
    • 36849104738 scopus 로고
    • Shockwave generation in rarefied gases by laser impact on beryllium targets
    • J. L. Bobin Y. A. Durand P.. P. Langer G. Tonon Shockwave generation in rarefied gases by laser impact on beryllium targets J. Appl. Phys. 39 9 4184 4189 1968
    • (1968) J. Appl. Phys. , vol.39 , Issue.9 , pp. 4184-4189
    • Bobin, J.L.1    Durand, Y.A.2    Langer, P..P.3    Tonon, G.4
  • 7
    • 0022797606 scopus 로고
    • Characterization of the cathode spot
    • B. Jüttner Characterization of the cathode spot IEEE Trans. Plasma Sci. PS-15 474 480 Oct. 1987
    • (1987) IEEE Trans. Plasma Sci. , vol.PS-15 , pp. 474-480
    • Jüttner, B.1
  • 8
    • 0025416125 scopus 로고
    • Momentum interchange between cathode spot plasma jets and background gases and vapors, and its implications on vacuum arc anode spot development
    • R. L. Boxman S. Goldsmith Momentum interchange between cathode spot plasma jets and background gases and vapors, and its implications on vacuum arc anode spot development IEEE Trans. Plasma Sci. 18 231 236 Apr. 1990
    • (1990) IEEE Trans. Plasma Sci. , vol.18 , pp. 231-236
    • Boxman, R.L.1    Goldsmith, S.2
  • 9
    • 0016331536 scopus 로고
    • Cathode spot erosion phenomena in the transition from vacuum to atmospheric pressure arcs
    • C. W. Kimblin Cathode spot erosion phenomena in the transition from vacuum to atmospheric pressure arcs J. Appl. Phys. 45 12 5235 5244 Dec. 1974
    • (1974) J. Appl. Phys. , vol.45 , Issue.12 , pp. 5235-5244
    • Kimblin, C.W.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.