Overview of effects of heavy metal contaminations, wafer characteristics gettering on device/circuit performance

Proceedings - The Electrochemical Society

Volumn 90, Issue 7, 1990, Pages 614-627

  Jastrzebski, L ^a  

^a UNIVERSITY OF SOUTH FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLOGRAPHY--DEFECTS; DATA STORAGE, DIGITAL--RANDOM ACCESS; INTEGRATED CIRCUIT MANUFACTURE; SEMICONDUCTOR MATERIALS--CHARGE CARRIERS;

CCD IMAGERS; DARK CURRENT GENERATION; DEFECT GENERATION; DRAM; MINORITY CARRIER; SURFACE PHOTOVOLTAGE;

HEAVY METALS;

EID: 0025628267     PISSN: 01616374     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)