Precise positioning mechanism utilizing rapid deformations of piezoelectric elements

Proceedings. IEEE Micro Electro Mechanical Systems-An Investigation of Micro Structures, Sensors, Actuators, Machines

Volumn , Issue , 1990, Pages 222-226

  Higuchi, T ^a   Yamagata, Y ^a   Furutani, K ^a   Kudoh, K ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL, MECHANICAL VARIABLES--POSITION; MECHANISMS--DEGREES OF FREEDOM; PIEZOELECTRIC TRANSDUCERS; ROBOTS--ARMS;

IMPACT DRIVE MECHANISM; MICRO ACTUATORS; MICRO MECHANISM; MICRO ROBOT ARM; PIEZOELECTRIC ELEMENTS; PRECISE POSITIONING;

ELECTROMECHANICAL DEVICES;

EID: 0025627079     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)