Crystallographic analysis of TiNi shape memory alloy thin film for micro actuator

Proceedings. IEEE Micro Electro Mechanical Systems-An Investigation of Micro Structures, Sensors, Actuators, Machines

Volumn , Issue , 1990, Pages 38-39

  Ikuta, Koji ^a   Fujita, Hiroyuki ^a   Ikeda, Michiaki ^a   Yamashita, Shinji ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS--DESIGN; CRYSTALLOGRAPHY; MATERIALS WITH MEMORY--THIN FILMS;

CRYSTALLOGRAPHIC ANALYSIS; MICRO ACTUATOR; MICRO ELECTROMECHANICAL SYSTEMS; SHAPE MEMORY ALLOY;

ELECTROMECHANICAL DEVICES;

EID: 0025601296     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)