Direct coupling system between nanometer world and human world

Proceedings. IEEE Micro Electro Mechanical Systems-An Investigation of Micro Structures, Sensors, Actuators, Machines

Volumn , Issue , 1990, Pages 203-208

  Hatamura, Yotaro ^a   Morishita, Hiroshi ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES--MICROELECTROMECHANICAL; MICROSCOPIC EXAMINATION--SCANNING ELECTRON MICROSCOPY; ROBOTICS--VISION SYSTEMS; SUBSTRATES--MACHINING;

MICROMACHINES; NANOMANIPULATOR; NANOROBOT; PRECISION MANUFACTURING; SEMICONDUCTOR MANUFACTURING; THREE-DIMENSIONAL VISION;

ROBOTS, INDUSTRIAL;

EID: 0025600731     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)