Observation of stress-induced voiding with an ultra-high voltage electron microscope

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 1990, Pages 209-215

  Tanikawa, A ^a   Okabayashi, H ^a   Mori, H ^a   Fujita, H ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

METALLIZING;

BAMBOO GRAIN STRUCTURE; STRESS-INDUCED VOIDING; VOID GROWTH;

INTEGRATED CIRCUIT TESTING;

EID: 0025600282     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/irps.1990.363523     Document Type: Conference Paper

References (13)