Film deposition by laser-induced vacuum arc evaporation

IEEE Transactions on Plasma Science

Volumn 18, Issue 6, 1990, Pages 917-922

  Scheibe, H J ^a   Siemroth, P ^a  

^a Institute Dresden   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC ARCS; LASER BEAMS--APPLICATIONS; SPECTROSCOPY, AUGER ELECTRON; TITANIUM AND ALLOYS; TITANIUM CARBIDE;

MULTILAYERED STRUCTURES; VACUUM ARCS;

FILMS;

EID: 0025590017     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.61503     Document Type: Article

References (20)

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3. P. J. Martin Structure and hardness of diamond-like carbon films prepared by arc evaporation J. Mat. Sci. Lett. 7 410 412 1988
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14. B. Buecken D. Schulze private communication
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