Submicron spaced lens array process technology for a high photosensitivity CCD image sensor

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1990, Pages 283-286

  Sano, Yoshikazu ^a   Nomura, Toru ^a   Aoki, Hiromitsu ^a   Terakawa, Sumio ^a   Kodama, Hirotatsu ^a   Aoki, Tadashi ^a   Hiroshima, Yoshimitsu ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

LENSES; OPTICAL FILTERS; SEMICONDUCTOR DEVICES, CHARGE COUPLED--PHOTOSENSITIVITY;

CCD IMAGE SENSORS; COLOR FILTERS; LENS ARRAYS;

IMAGE SENSORS;

EID: 0025578864     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)