1000 and 1500 volts planar devices using field plate and semi-resistive layers: Design and fabrication

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1990, Pages 803-806

  Charitat, G ^a   Jaume, D ^a   Peyre Lavigne, A ^a   Rossel, P ^a  

^a Systems   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELD EFFECTS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE;

FIELD PLATE LAYERS; PLANAR DEVICES; SEMI-RESISTIVE LAYERS;

SEMICONDUCTOR DEVICES;

EID: 0025577018     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)