LPCVD profile simulation using a re-emission model

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1990, Pages 917-920

  McVittie, J P ^a   Rey, J C ^a   Cheng, L Y ^a   IslamRaja, M M ^a   Saraswat, K C ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; SEMICONDUCTOR MATERIALS;

3-D SIMULATORS; LPCVD; RE-EMISSION MODELS;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0025577015     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)