A polysilicon transistor technology for large capacity SRAMs

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1990, Pages 469-472

  Ikeda, Shuji ^a   Hashiba, Soichiro ^a   Kuramoto, Isamu ^a   Katoh, Hisayuki ^a   Ariga, Seiichi ^a   Yamanaka, Toshiaki ^a   Hashimoto, Takashi ^a   Hashimoto, Naotaka ^a   Meguro, Satoshi ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DATA STORAGE, SEMICONDUCTOR; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICES, MOS; TRANSISTORS, FIELD EFFECT;

NMOS TRANSISTORS; PMOS TRANSISTORS; POLYSILICON TRANSISTORS; SRAM;

DATA STORAGE, DIGITAL;

EID: 0025575393     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)