The effect of thermoelastic internal friction on the Q of micromachined silicon resonators

Technical Digest, 1990 Solid-State Sensor and Actuator Workshop

Volumn , Issue , 1990, Pages 13-16

  Roszhart, Terry V ^a  

^a USA ^*

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES - MICROELECTROMECHANICAL; FRICTION; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICES; THERMOELASTICITY;

INTERNAL FRICTION; RESONATING BEAM DEVICES; SILICON RESONATORS;

RESONATORS, CRYSTAL;

EID: 0025557607     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/solsen.1990.109810     Document Type: Conference Paper

References (6)