Nondestructive evaluation of trace metals and application to defect generation

Conference on Solid State Devices and Materials

Volumn , Issue , 1990, Pages 1131-1134

  Tsuchiya, N ^a   Tanaka, M ^a   Kageyama, M ^a   Kubota, A ^a   Matsushita, Y ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER AND ALLOYS; CRYSTALS - DEFECTS; FLUORESCENCE; IRON AND ALLOYS - TRACE ANALYSIS;

DEFECT GENERATION; SEMICONDUCTOR WAFERS; TOTAL REFLECTION ENERGY DISPERSIVE X-RAY FLUORESCENCE (TREX);

SEMICONDUCTING SILICON;

EID: 0025556926     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.7567/ssdm.1990.s-f-18     Document Type: Conference Paper

References (0)