Silicon photodiodes optimized for the EUV and soft x-ray regions

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 1344, Issue , 1990, Pages 372-377

  Canfield, L R ^a   Kerner, Jonathan ^a   Korde, Raj ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON; ULTRAVIOLET RADIATION; X-RAYS;

SILICON PHOTODIODES;

SEMICONDUCTOR DIODES, PHOTODIODE;

EID: 0025549854     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.23265     Document Type: Conference Paper

References (9)