Stacked capacitor cell with ring structure

Conference on Solid State Devices and Materials

Volumn , Issue , 1990, Pages 833-836

  Shinmura, N ^a   Kakimoto, S ^a   Iguchi, K ^a   Uda, K ^a   Takagi, J ^a  

^a SHARP CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DATA STORAGE, DIGITAL - RANDOM ACCESS; ELECTRODES; LITHOGRAPHY - PHOTOLITHOGRAPHY; SEMICONDUCTING SILICON;

DYNAMIC RANDOM ACCESS MEMORY; RING CAPACITORS;

CAPACITORS;

EID: 0025548626     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)