Effects of the non-vanishing tip size in mechanical profile measurements

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 1332, Issue pt 2, 1990, Pages 504-514

  Church, E L ^a   Takacs, P Z ^a  

^a US Army ARDEC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL TECHNIQUES - PERTURBATION TECHNIQUES; OPTICAL VARIABLES MEASUREMENT - ANALYSIS; OPTICS - GEOMETRICAL; SURFACES - MEASUREMENTS;

MECHANICAL PROFILE MEASUREMENTS; OPTICAL PROFILING; STYLUS PROFILING;

OPTICAL INSTRUMENTS;

EID: 0025547710     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)