Verification of FEM analysis of load-deflection methods for measuring mechanical properties of thin films

Technical Digest, 1990 Solid-State Sensor and Actuator Workshop

Volumn , Issue , 1990, Pages 70-73

  Pan, Jeffrey Y ^a   Lin, Pinyen ^a   Maseeh, Fariborz ^a   Senturia, Stephen D ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL MODELS; MATHEMATICAL TECHNIQUES - FINITE ELEMENT METHOD; MEMBRANES; STRESSES;

BIAXIAL MODULUS; LOAD DEFLECTION METHODS; RESIDUAL STRESS; THIN FILMS;

FILMS;

EID: 0025541504     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/solsen.1990.109823     Document Type: Conference Paper

References (9)