Thin film effects of double-gate polysilicon MOSFET

Conference on Solid State Devices and Materials

Volumn , Issue , 1990, Pages 393-396

  Hashimoto, T ^a   Mine, T ^a   Yamanaka, T ^a   Hashimoto, N ^a   Shimizu, A ^a   Nishida, T ^a   Kawamoto, Y ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING FILMS; SEMICONDUCTING SILICON;

DOUBLE GATE EFFECTS; PUNCH THROUGH RESISTANCE; THIN FILM EFFECTS;

SEMICONDUCTOR DEVICES, MOSFET;

EID: 0025539981     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.7567/ssdm.1990.c-9-4     Document Type: Conference Paper

References (0)