A pressure-balanced electrostatically-actuated microvalve

Technical Digest, 1990 Solid-State Sensor and Actuator Workshop

Volumn , Issue , 1990, Pages 123-127

  Huff, Michael A ^a   Mettner, Michael S ^a   Lober, Theresa A ^a   Schmidt, Martin A ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC DEVICES; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICES; VALVES AND VALVE GEAR;

ELECTROSTATIC ACTUATION; MICROVALVES; RESIDUAL PRESSURE;

ELECTROMECHANICAL DEVICES;

EID: 0025537297     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/solsen.1990.109835     Document Type: Conference Paper

References (10)