Material handling automation for wafer fabrication facilities

1990 Proceedings, IEEE/CHMT Ninth International Electronic Manufacturing Technology Symposium

Volumn , Issue , 1990, Pages 277-286

  Pillai, Devadas ^a  

^a INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED MANUFACTURING; INTEGRATED CIRCUIT MANUFACTURE - AUTOMATION; SEMICONDUCTOR DEVICE MANUFACTURE - AUTOMATION;

FACTORY AUTOMATION; MATERIALS CONTROL; SEMICONDUCTOR PRODUCTION; WAFER FABRICATION FACILITIES;

MATERIALS HANDLING;

EID: 0025531102     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)