(110)-Oriented Diamond Films Synthesized by Microwave Chemical-Vapor Deposition

Journal of Materials Research

Volumn 5, Issue 11, 1990, Pages 2469-2482

  Kobashi, Koji ^a   Nishimura, Kozo ^a   Miyata, Koichi ^a   Kumagai, Kazuo ^a   Nakaue, Akimitsu ^a  

^a KOBE STEEL LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON - AMORPHOUS; FILMS - CHEMICAL VAPOR DEPOSITION; HYDROGEN - APPLICATIONS; METHANE - APPLICATIONS; SILICON AND ALLOYS;

HYDROGEN PLASMA TREATMENT; MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION; X-RAY DIFFRACTION STUDY;

DIAMONDS;

EID: 0025522746     PISSN: 08842914     EISSN: 20445326     Source Type: Journal    
DOI: 10.1557/JMR.1990.2469     Document Type: Article

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