Low friction coatings of diamond-like carbon with silicon prepared by plasma-assisted chemical vapor deposition

Journal of Materials Research

Volumn 5, Issue 11, 1990, Pages 2567-2571

  Oguri, K ^a   Arai, T ^a  

^a Rd Management Section   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS - CHEMICAL VAPOR DEPOSITION; PROTECTIVE COATINGS - WEAR RESISTING; SPECTROSCOPY, RAMAN - APPLICATIONS; STEEL - PROTECTIVE COATINGS;

AMORPHOUS CARBON-SILICON COATINGS; BALL-ON-DISK TESTS; DIAMOND-LIKE CARBON FILMS; LOW-FRICTION COATINGS;

CARBON;

EID: 0025519433     PISSN: 08842914     EISSN: 20445326     Source Type: Journal    
DOI: 10.1557/JMR.1990.2567     Document Type: Article

References (11)

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