The Effects of UV Laser Irradiation on The Filament-Assisted Deposition of Diamond

Journal of Materials Research

Volumn 5, Issue 11, 1990, Pages 2337-2344

  Celii, F G ^a   Nelson, H H ^a   Pehrsson, P E ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILMS - CHEMICAL VAPOR DEPOSITION; LASER BEAMS - EFFECTS; MICROSCOPIC EXAMINATION - APPLICATIONS; SPECTROSCOPY, AUGER ELECTRON - APPLICATIONS; SPECTROSCOPY, RAMAN - APPLICATIONS;

CRYSTALLITES; DIAMOND NUCLEATION; FILAMENT-ASSISTED CHEMICAL VAPOR DEPOSITION; UV LASER IRRADIATION;

DIAMONDS;

EID: 0025518969     PISSN: 08842914     EISSN: 20445326     Source Type: Journal    
DOI: 10.1557/JMR.1990.2337     Document Type: Article

References (20)

1. J.C. Angus and C.C. Hayman, Science 241, 913 (1988).
2. M. Rothschild, C. Amone, and D.J. Ehrlich, J. Vac. Sci. Technol. B 4, 310 (1986).
3. K. Hirabayashi, Y. Taniguchi, O. Takamatsu, T. Ikeda, K. Ikoma, and N. Iwasaki-Kurihara, Appl. Phys. Lett. 53, 1815 (1988).
4. J.S. Ma, H. Kawarada, T. Yonehara, J.-I. Suzuki, J. Wei, Y. Yokota, and A. Hiraki, Appl. Phys. Lett. 55, 1071 (1989).
5. K. Kobashi, K. Miyata, K. Kumagai, A. Nakaue, H. Tachibana, T. Inoue, and Y. Kawate, Proc. 1st Int. Symp. on Diamond and Diamond-Like Films, edited by J.P. Dismukes, A.J. Purdes, K.E. Spear, B.S. Meyerson, K.V. Ravi, T.D. Moustakas, and M. Yoder (The Electrochemical Society, 1988), Vol. 89–12, p. 139.
6. K. Kitihama, K. Hirata, H. Nakamatsu, S. Kawai, N. Fujimori, T. Imai, H. Yoshino, and A. Doi, Appl. Phys. Lett. 49, 634 (1986)
7. K. Kitihama, K. Hirata, H. Nakamatsu, S. Kawai, N. Fujimori, and T. Imai, in Photon, Beam and Plasma Stimulated Chemical Processes at Surfaces, edited by V.M. Donnelly, I.P. Herman, and M. Hirose (Mater. Res. Soc. Symp. Proc. 75, Pittsburgh, PA, 1987), p. 309.
8. K. Kitihama, Appl. Phys. Lett. 53, 1812 (1988)
9. Y. Goto, T. Yagi, and H. Nagai, in Laser and Particle-Beam Modification of Chemical Processes on Surfaces, edited by A.W. Johnson, G.L. Loper, and T.W. Sigmon (Mater. Res. Soc. Symp. Proc. 129, Pittsburgh, PA, 1989), p. 213.
10. O. Matsumoto, H. Toshima, and Y. Kanzaki, Thin Solid Films 128, 341 (1985).
11. Y. Saito, K. Sato, H. Tanaka, K. Fujita, and S. Matuda, J. Mater. Sci. 23, 842 (1988).
12. D.B. Oakes, J.E. Butler, K.A. Snail, W.A. Carrington, and L.M. Hanssen, J. Appl. Phys. (in press).
13. A.A. Galuska, H.H. Madden, and R.E. Allred, Appl. Surf. Sci. 32, 253 (1988).
14. F.G. Celii, R.D. Johnson, III, J.E. Butler, and J.W. Hudgens, unpublished work.
15. F.G. Celii, P.E. Pehrsson, H.-t. Wang, and J.E. Butler, Appl. Phys. Lett. 52, 2053 (1988).
16. S. Gordon and B.J. McBride, Computer Program for Chemical Equilibrium Calculations, NASA-Lewis Research Center, NASA SP-273, March 1976.
17. J.G. Calvert and J.N. Pitts, Photochemistry (J. Wiley & Sons, Inc., New York, 1966).
18. J.H. Bechtel, J. Appl. Phys. 46, 1585 (1975).
19. S.J. Harris and D.N. Belton, J. Appl. Phys. 66, 4223 (1989).
20. D.N. Belton, S.J. Harris, S.J. Schmieg, A.M. Weiner, and T.A. Perry, Appl. Phys. Lett. 54, 416 (1989).