Refractive Index Profiles of Thermally Grown and Chemically Vapor Deposited Films on Silicon

Journal of the Electrochemical Society

Volumn 137, Issue 11, 1990, Pages 3536-3541

  Chongsawangvirod, S ^a   Irene, E A ^a   Kalnitsky, A ^b   Tay, S P ^b   Ellul, J P ^b  

^a UNIVERSITY OF NORTH CAROLINA   (United States)

^b NORTEL NETWORKS   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS - CHEMICAL VAPOR DEPOSITION; FILMS - DIELECTRIC; OPTICAL VARIABLES MEASUREMENT - REFRACTIVE INDEX;

SINGLE WAVELENGTH ELLIPSOMETRY; THERMALLY GROWN FILMS;

SEMICONDUCTING SILICON;

EID: 0025516810     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2086263     Document Type: Article

References (24)

1. E. A. Taft and L. Cordes, Journal of the Electrochemical Society, 126, 131 (1979).
2. D. E. Aspnes and J. B. Theeten, Journal of the Electrochemical Society, 127, 1359 (1980).
3. A. Kalnitsky, S. P. Tay, J. P. Ellul, S. Chongsawangvirod, J. Andrews, and E. A. Irene, Journal of the Electrochemical Society, 137, 234 (1989).
4. A. Kalnitsky, S. P. Tay, and I. D. Calder, Journal of the Electrochemical Society, 135, 1271 (1988).
5. F. J. Grunthaner and P. J. Grunthaner, Mater. Sci. Rep., 1, No. 2, 3, December (1986).
6. E. A. Irene, CRC Crit. Rev. Solid State Mater. Sci., 14, 175 (1988).
7. E. A. Irene, Journal of the Electrochemical Society, 121, 1613 (1974).
8. W. Kern and D. A. Puotinen, RCA Rev., 31, 187 (1970).
9. E. A. Irene, E. Tierney, and J. Angillelo, Journal of the Electrochemical Society, 129, 2594 (1982).
10. G. Lucovsky, M. J. Mantini, J. K. Srivastava, and E. A. Irene, J. Vac. Sci. Technol. B5 (2), 530 (1986).
11. E. Kobeda and E. A. Irene, J. Vac. Sci. Technol., B6 (2), 574 (1988).
12. G. G. Fountain, S. V. Hattangady, R. A. Rudder, R. J. Markunas, G. Lucovsky, S. S. Kim, and D. V. Tsu, J. Vac. Sci. Technol., A7 (3), 576 (1989).
13. G. Lucovsky, J. T. Fitch, D. V. Tsu, and S. S. Kim, J. Vac. Sci. Technol., A7 (3), 1136 (1989).
14. B. Robinson, T. N. Nguyen, and M. Copel, Am. Inst. Phys. Conf. Proc., 167, 112 (1988).
15. S. V. Nguyen and S. Fridmann, Journal of the Electrochemical Society, 134 (9), 2324 (1987).
16. S. Nakahara, Thin Solid Films, 64, 149 (1979).
17. E. A. Irene, Journal of the Electrochemical Society, 125, 1708 (1978).
18. J. M. Gibson and D. W. Dong, Journal of the Electrochemical Society, 127, 2722 (1980).
19. E. A. Irene, J. Appl. Phys., 54, 5416 (1983).
20. B. Nielsen, K. G. Lynn, D. O. Welch, T. C. Leung, and G. W. Rubloff, Phys. Rev. Lett, 40, 1434 (1989).
21. W. G. Spitzer and J. R. Ligenza, J. Phys. Chem. Solids, 17, 196 (1961).
22. E. A. Irene, Journal of the Electrochemical Society, 120, 1613 (1974).
23. E. Kobeda and E. A. Irene, J. Vac. Sci. Technol., B5, 15 (1986).
24. J. T. Fitch and G. Lucovsky, Am. Inst. Phys. Conf. Proc., No. 167, p. 124 (1988).