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Volumn 33, Issue 9, 1990, Pages 1849-1871
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Global modelling of heat transfer in crystal growth furnaces
a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTALS;
HEAT TRANSFER - ENCLOSURES;
SEMICONDUCTOR DEVICE MANUFACTURE - CONTROL;
CRYSTAL GROWTH FURNACES;
CZOCHRALSKI PROCESS;
RADIATIVE EXCHANGERS;
SEMICONDUCTOR MATERIALS;
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EID: 0025488686
PISSN: 00179310
EISSN: None
Source Type: Journal
DOI: 10.1016/0017-9310(90)90218-J Document Type: Article |
Times cited : (243)
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References (43)
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