메뉴 건너뛰기




Volumn 33, Issue 9, 1990, Pages 1849-1871

Global modelling of heat transfer in crystal growth furnaces

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALS; HEAT TRANSFER - ENCLOSURES; SEMICONDUCTOR DEVICE MANUFACTURE - CONTROL;

EID: 0025488686     PISSN: 00179310     EISSN: None     Source Type: Journal    
DOI: 10.1016/0017-9310(90)90218-J     Document Type: Article
Times cited : (243)

References (43)
  • 4
    • 0023964781 scopus 로고
    • On the quasi-steady-state assumption in modelling batchwise Czochralski growth
    • (1988) J. Crystal Growth , vol.87 , pp. 251
    • Derby1    Brown2
  • 5
    • 46149141788 scopus 로고
    • Thermal-capillary analysis of Czochralski and liquid encapsulated Czochralski crystal growth—I. Steady-state simulation
    • (1986) J. Crystal Growth , vol.74 , pp. 605
    • Derby1    Brown2
  • 6
    • 0022722426 scopus 로고
    • Thermal-capillary analysis of Czochralski and liquid encapsulated Czochralski crystal growth—II. Processing strategies
    • (1986) J. Crystal Growth , vol.75 , pp. 227
    • Derby1    Brown2
  • 9
    • 36549060646 scopus 로고
    • Thermoelastic analysis of GaAs in LEC growth configuration—I. Effect of liquid encapsulant on thermal processes
    • (1987) J. Crystal Growth , vol.80 , pp. 37
    • Motakef1    Witt2
  • 10
    • 0023371072 scopus 로고
    • Effect of natural convection and thermal transparency of liquid encapsulant on thermal stresses during LEC growth of GaAs
    • (1987) Int. J. Heat Mass Transfer , vol.30 , pp. 1487
    • Motakef1
  • 11
    • 0024014473 scopus 로고
    • Thermoelastic analysis of GaAs in LEC growth configuration—II. Temporal evolution of the stress field
    • (1988) J. Crystal Growth , vol.88 , pp. 341
    • Motakef1
  • 12
    • 84917900203 scopus 로고
    • Simulation numérique des échanges thermiques et application à la croissance des cristaux semi-conducteurs
    • 2nd Edn, Université Catholique de Louvain, Belgium
    • (1985) Ph.D. Dissertation
    • Wouters1
  • 20
    • 84861092347 scopus 로고
    • Unified treatment for thermal radiation transfer processes—gray, diffuse radiators and absorbers
    • 2nd Edn, ASME
    • (1957) Paper No. 57-A-34
    • Gebhart1
  • 23
    • 0010238151 scopus 로고
    • Analysis of heat interchange by radiation between diffuse surfaces
    • (1935) Tech. Phys. USSR , vol.1 , Issue.5-6 , pp. 555
    • Poljak1
  • 28
    • 0008531083 scopus 로고
    • A thermoelastic analysis of the thermal stress produced in a semi-infinite cylindrical single crystal during the Czochralski growth
    • (1985) J. Crystal Growth , vol.73 , pp. 96
    • Kobayashi1    Iwaki2
  • 31
    • 0003453426 scopus 로고
    • Temperature profile and thermal stress calculations in GaAs crystals growing from the melt
    • (1983) J. Crystal Growth , vol.61 , pp. 576
    • Duseaux1
  • 37
    • 49049139022 scopus 로고
    • Unified approach to simulation on deforming elements with application to phase change problems
    • (1982) J. Comput. Phys. , vol.47 , pp. 387
    • Lynch1
  • 40
    • 0002230791 scopus 로고
    • Analytical representation of the shape of the meniscus in Czochralski growth
    • (1983) J. Crystal Growth , vol.63 , pp. 13
    • Hurle1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.