Finite element analysis of planar stress anisotropy and thermal behavior in thin films

IBM Journal of Research and Development

Volumn 34, Issue 5, 1990, Pages 706-717

  Young, K F ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL TECHNIQUES - FINITE ELEMENT METHOD; STRESSES;

ANISOTROPIC STRESS DISTRIBUTION;

FILMS;

EID: 0025481963     PISSN: 00188646     EISSN: None     Source Type: Journal    
DOI: 10.1147/rd.345.0706     Document Type: Article

References (7)