Sputter reduction of oxides by ion bombardment during Auger depth profile analysis

Surface and Interface Analysis

Volumn 15, Issue 8, 1990, Pages 487-497

  Mitchell, D F ^a   Sproule, G I ^a   Graham, M J ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

SPECTROSCOPY, AUGER ELECTRON; SPUTTERING; SURFACES;

DEPTH PROFILES; ION BOMBARDMENT;

OXIDES;

EID: 0025473115     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.740150808     Document Type: Article

References (27)

1. Preferential sputtering of oxides: A comparison of model predictions with experimental data
2. Quantitative analysis of iron oxides using Auger electron spectroscopy combined with ion sputtering
3. Effects of sputtering on the surface composition of niobium oxides